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The sputtering system: 1—cylindrical stainless-steel chamber; 2—cathode; 3—circular anode
![PDF] Design and Fabrication of a DC Cylindrical Magnetron Sputtering Device | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/9f68ebf6b923f3e0a560cf31f69fa0e83cdb31c1/1-Figure1-1.png "PDF] Design and Fabrication of a DC Cylindrical Magnetron Sputtering Device | Semantic Scholar")
PDF] Design and Fabrication of a DC Cylindrical Magnetron Sputtering Device | Semantic Scholar
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Section III Sputtering © 1998, Angus Rockett. - ppt download
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Analysis of magnetic field distribution in a cylindrical-type magnetron sputtering system - Kang-Yul Bae, Young-Soo Yang, Bum-Ho Choi, 2013
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Nanostructure of Rutile TiO2 Thin Films Prepared on Unheated Substrate by Dual Cathode DC Unbalanced Magnetron Sputtering
